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Optical measurement might be the way to go at that scale. Most of the items you are measuring are going to be flatish
It's a bitch to do it optically, too. I have the equipment to perform optical metrology down to the micron. The reason I care is surface finish. quarter wave of 380nm is a tenth of a micron. If I can hold a tenth of a micron I can mirror polish with the machine. "measurement" is utterly pointless for what I'm doing other than verifying the machine.